SCANNING-TYPE TUNNEL MICROSCOPE

摘要

PURPOSE:To select a spot desired to be observed by a scanning-type tunnel microscope, arbitrarily and highly precisely, by providing a sample stage moving a sample within a plane forming a prescribed angle to an electron beam in the scanning-type tunnel microscope which is incorporated in a sample chamber of a scanning-type electron microscope. CONSTITUTION:A scanning-type tunnel microscope (STM) is disposed in a sample chamber 3 of a scanning-type electron microscope (SEM). An STM base 24 is provided on an SEM stage 23. Planes 24a and 24b of the STM base 24 form an angle of 45 deg. respectively to an electron beam 34 coming out of an objective lens 21. A sample 33 fitted on a sample stage 25 on the plane 24a is made movable two-dimensionally by a knob outside the sample chamber 3. On the plane 24b, a fine-motion mechanism and a rough-motion mechanism of a probe 41 and others are disposed. A rough motion of the probe 41 is attained by a piezo-actuator 50 and others. Three piezo-actuators 55 and 56 and others constitute the fine-motion mechanism of the probe 41 and conduct approach to and separation from a sample surface and scanning thereof.