VAPOR DEPOSITION APPARATUS FOR SEMICONDUCTOR WAFER,申请号JP19900116412-传众专利搜索

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发明名称	VAPOR DEPOSITION APPARATUS FOR SEMICONDUCTOR WAFER
摘要
申请公布号	JPH0413871(A)	申请公布日期	1992.01.17
申请号	JP19900116412	申请日期	1990.05.01
申请人	SUMITOMO ELECTRIC IND LTD	发明人	SAKURADA TAKASHI;TAKEBE TOSHIHIKO;SHIRAKAWA FUTATSU
分类号	C23C14/54;H01L21/285	主分类号	C23C14/54
代理机构		代理人
主权项
地址

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