| 摘要 |
PURPOSE:To stabilize the laser output without depending on the change of power supply voltage, by detecting the voltage between terminals of a primary side smoothing capacitor, changing the switching of a switching low voltage power supply, and controlling the output power of a switching high voltage power supply. CONSTITUTION:A switching low voltage power supply 21 is installed, which is equipped with a rectifier 22 on the input side of a switching high voltage power supply 4, a smoothing capacitor 23, and a switching element 24. The voltage between terminals of a primary side smoothing capacitor 12 of the switching high voltage power supply 4 is detected, and the switching frequency or the switching-ON time of the switching low voltage power supply 2 is changed under a specified switching operation frequency, according to the above detected voltage, thereby controlling the output power of the switching high voltage power supply 4. Hence the voltage between the terminals of the primary side smoothing capacitor 12 is not changed when a power supply voltage is changed, so that the laser output can be stabilized. |
