| 摘要 |
A movable table having two yokes mounted one above the other so as to be movable in two directions perpendicular to each other. Stage guides are provided on top surfaces of the yokes to extend in a direction perpendicular to the moving direction of the yokes. The upper yoke is formed with a through hole having a length determined by the length of the stage guides thereof. A stage is mounted above said yokes at the intersection of the yokes. On the bottom surface of the stage, there are provided slide bearings held in engagement with the stage guides of the upper yoke and slide bearings extending through the through hole in the upper yoke and held in engagement with the stage guides on the lower yoke. |
