Composite comprising a silicon substrate and layered superconducting thin films.

摘要

A composite comprising a silicon substrate (1) and a plurality of layers of a first oxide superconductor layer (3), a dielectric material layer (4), a second oxide superconductor layer (5), a second dielectric material layer (6) and a third oxide superconductor layer (7) deposited directly or through a buffer layer (2) in this order on the silicon substrate. The composite is used for fabricating superconducting devices such as Josephson element, SQUID and microwave devices.