发明名称 |
Polymer-assisted deposition of films |
摘要 |
A polymer assisted deposition process for deposition of metal oxide films is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures to yield metal oxide films. Such films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.
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申请公布号 |
US7365118(B2) |
申请公布日期 |
2008.04.29 |
申请号 |
US20030616479 |
申请日期 |
2003.07.08 |
申请人 |
LOS ALAMOS NATIONAL SECURITY, LLC |
发明人 |
MCCLESKEY THOMAS M.;BURRELL ANTHONY K.;JIA QUANXI;LIN YUAN |
分类号 |
C08K3/10;B05D3/02;C08F6/00;C08K3/00;C09C1/00;C09D5/00;C23C18/02;C23C18/12;H01L39/24 |
主分类号 |
C08K3/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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