发明名称 Vacuum ion plating method for the deposition of thin layers.
摘要 The vacuum ion-plating method for the deposition of thin layers, operates as follows: The substrates on which the thin layers are to be deposited are exposed in a vacuum chamber to a plasma condensed by a magnetic field. The substrates are thus negatively polarized and a percentage of the material to be deposited is ionized after vaporization from an appropriate source. The invention may be placed in the technical field for the deposition of thin layers. The above invention finds some advantageous applications in the industrical field concerning the processing and treatment of metal, glass, resins and other's and generally in the electronic and optical field, etc, etc, for civilian and military uses, wherever there is a requirement for vacuum deposition of thin layers.
申请公布号 EP0465733(A1) 申请公布日期 1992.01.15
申请号 EP19900201911 申请日期 1990.07.13
申请人 CONSORZIO CE.TE.V. CENTRO TECNOLOGIE DEL VUOTO 发明人 MISIANO, CARLO;SIMONETTI, ENRICO
分类号 C23C14/32 主分类号 C23C14/32
代理机构 代理人
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