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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH0410564(A)
申请公布日期
1992.01.14
申请号
JP19900111954
申请日期
1990.04.27
申请人
NEC CORP
发明人
OOKA HIDEYUKI
分类号
H01L21/336;H01L21/8234;H01L27/088;H01L29/78
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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