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发明名称
SPUTTERED FILM FORMING DEVICE FOR BALL
摘要
申请公布号
JPH049468(A)
申请公布日期
1992.01.14
申请号
JP19900113782
申请日期
1990.04.26
申请人
YASKAWA ELECTRIC CORP
发明人
YAMAZUMI SHUJI;IMAI TERUAKI;ITABE TADAKI
分类号
C23C14/34;C23C14/50
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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