| 摘要 |
PURPOSE:To bond a control electrode on each supporting post with laser welding by positioning the supporting post and the control electrode with a space under the condition that a heater and the control electrode are held with a predetermined space. CONSTITUTION:A control electrode 2 is provided on supporting posts 5, 5 with a space L, and an insulator 3 itself is moved vertically so that a GK space between the control electrode 2 and a heater 6, which is stretched between heater leads 4, 4 from a side opening 2b of the control electrode 2, coincides with a predetermined space H. At this stage, the space L between the supporting posts 5, 5 and the control electrode 2 becomes a space L' fluctuated with movement of the insulator 3. The laser beam is irradiated to the control electrode 2 on the supporting posts 5, 5 to perform laser welding, and the control electrode 2 is welded to be hanged on the supporting posts 5, 5, and they are bonded to be unified. Secure welding and bonding is performed under the condition that a predetermined GK space H is kept. |
