| 摘要 |
<p>PURPOSE:To obtain an apparatus by which the loss of an irradiation light quantity is small and whose structure is simple while ultraviolet rays are irradiated simultaneously with an in parallel with the pushing-up operation of a pushing-up pin by a method wherein an energy-beam irradiation mean is provided with a semireflecting mirror and a total-reflecting mirror in the light path of a light source so as to sandwich the pushing-up pin. CONSTITUTION:At a picking-up apparatus, the following are provided: an energy-beam irradiation means by which a chip-fixing tape T constituted so as to lower its adhesive power by irradiation with an energy beam can be irradiated with an energy beam L from its rear side; and a pushing-up pin 4 which pushes up a chip-shaped component C from the rear side of the tape T via the tape T. In addition, a light source 9 of the energy-beam irradiation means is installed on the side of the pushing-up pin 4. At the picking-up apparatus, the energy beam irradiation means is provided with a semireflecting mirror 7 and a total-reflecting mirror 8 in the light path of the light source 9 so as to sandwich the pushing-up pin 4; the semireflecting mirror 7 is constituted in such a way that nearly half of the energy beam incident form the light source 9 can be reflected toward the tape T; the total-reflecting mirror 8 is constituted in such a way that nearly residual half of the energy beam can be reflected toward the tape T.</p> |
