COUPLING UNIT, TEST HEAD, AND TEST APPARATUS

摘要

A COUPLING UNIT (150) FOR ELECTRICALLY COUPLING A PERFORMANCE BOARD (300) ON WHICH AN ELECTRONIC DEVICE (350) IS MOUNTED AND A TESTER CONTROL UNIT (400) FOR GENERATING A CONTROL SIGNAL FOR CONTROLLING A TEST OF THE ELECTRONIC DEVICE (350) INCLUDES A BOARD CONTAINING UNIT (30) FOR CONTAINING A TEST BOARD (500) ELECTRICALLY COUPLED TO THE TESTER CONTROL UNIT (400) IN ORDER THAT THE TEST BOARD (500) IS REPLACEABLE ON ONE OF A PLURALITY OF DIFFERENT HOLDING POSITIONS AND A COUPLING CABLE (10) WHOSE ONE END IS COUPLED TO THE TEST BOARD (500) HELD IN THE HOLDING POSITION AND THE OTHER END IS COUPLED TO THE PERFORMANCE BOARD (300).