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发明名称
ION IMPLANTATING DEVICE
摘要
申请公布号
JPH046739(A)
申请公布日期
1992.01.10
申请号
JP19900106453
申请日期
1990.04.24
申请人
ULVAC JAPAN LTD
发明人
TSUKAGOSHI OSAMU;SAKURADA YUZO;KATAGAWA TAKESHI
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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