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发明名称
SPIN CHUCK FITTED WITH LIQUID TANK OF ROTARY COATING APPARATUS
摘要
申请公布号
JPH047060(A)
申请公布日期
1992.01.10
申请号
JP19900107095
申请日期
1990.04.23
申请人
OKI ELECTRIC IND CO LTD
发明人
MACHIDA TETSUSHI
分类号
G03F7/16;B05C11/08;B05D1/40;H01L21/027
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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