FLEXIBLE FILM SPEAKER AND THE PROCESS FOR FABRICATION THEREOF

摘要

A flexible film speaker and a method for manufacturing the same are provided to improve sound pressure by replacing a thick PET(Polyethylene Terephthalate) film with a transparent insulating oxide thin film. A flexible thin film speaker includes a piezoelectric polymer film(100) and a transparent conductive oxide thin film(110). The transparent conductive oxide thin film is formed in both sides of the piezoelectric polymer film by vacuum deposition. The thickness of the transparent conductive oxide thin film is 50 to 300 nm. A transparent insulating oxide thin film(120) is formed on the transparent conductive oxide thin film by the vacuum deposition. The transparent insulating thin film is made of SiO2. The transparent conductive oxide thin film is made of one or two selected among In2O5, ZnO and SnO2. An electrode pattern is formed in the transparent conductive oxide thin film.