| 摘要 |
PURPOSE:To obtain a base plate which is excellent in productivity and free from abnormality in appearance and has a high thermal conductivity by adding Y2O3 and carbon to AlN of a main component and molding the mixture and degreasing this molded body and thereafter roasting it at normal pressure in the nitrogen flow. CONSTITUTION:0.5-10 wt.% Y2O3, carbon or a compd. which produces carbon by roasting of 0.01-0.1 wt.% expressed in terms of carbon are added as a sintering adjuvant to AlN of a main component. This mixture is molded and the molded body is degreased. Then the aimed AlN sintered body is obtained by roasting this molded body at 1750-1950 deg.C in the nitrogen flow at normal pressure. As the atmosphere during roasting, the nitrogen flow may be utilized but the atmosphere interrupted from carbon is necessary. It is preferable that the molded body is roasted e.g. in a crucible made of AlN. When the molded body is roasted in the atmosphere contg. carbon e.g. in the crucible made of carbon, a complete dense body is not obtained. |
