| 摘要 |
PURPOSE:To improve durability by using the sintered body of SiC formed by mixing SiC powder having specific particle sizes and SiC powder formed by synthesizing a silane compd. or silicon halide and hydrocarbon by a vapor reaction and sintering the mixture as the reflecting mirror. CONSTITUTION:The 1st SiC powder having 0.1 to 10mum average particle sizes is produced by an SiO2 reduction method, etc. The gaseous raw materials of the silane compd. or silicon halide and hydrocarbon are introduced into the plasma of a nonoxidative atmosphere of Ar, etc., and are brought into the vapor reaction in a rage from < 1atm pressure to 0.1 Torr to synthesize the 2nd SiC powder having good sinterability. After the 1st SiC powder and 0.5 to 50wt.% the 2nd SiC powder are mixed, the mixture is molded to a prescribed shape. The molding is heated and sintered in a 1800 to 2400 deg.C range, by which the reflecting mirror for lasers having >=2.9g/cm<3> density of the sintered body, >=150W/m.k thermal conductivity at room temp. and <=0.03 mum max. height of the specular surface is obtd. |
