| 摘要 |
PURPOSE:To prevent drop of signal quality due to inhomogeneity of ionized space and deterioration of the anti-vibration performance and accomplish shortening of the construction term, suppression of the production costs, and stabilization of the quality by forming an anode electrode and a cathode electrode either by the thick film printing means or by photo-lighographic means. CONSTITUTION:An anode electrode 22 and a cathode electrode 23 are formed on an insulative plate 21 and 24, respectively, using either the thick film printing technique or photo-lighographic technique. A space for electrode is filled with ionized gas 25, example of which is inert gas such as neon, argon, and xenon. The inter-electrode distance is held by pinching with an insulation or a rib structure of low melting point glass which is formed alike by the thick film printing technique or photo-lithographic technique. Therefore, the inter-electrode distance and ionization space can be controlled with high precision. This prevents drop of signal quality due to inhomogeneity of the ionized space and deterioration of the anti-vibration performance, shortens the construction term, suppresses the production cost, and stabilizes the quality of the products.
|
