| 摘要 |
PURPOSE:To prevent the development of shifting to a pattern to be marked by parallelly facing a first and second rotary masks, rotating under making the same axial center and holding as possible to rotate so that the rotations are not mutually interfered. CONSTITUTION:The first rotary mask 1 is driven with a stepping motor 4 through the rotary shaft 3. A holding ring 8 having the same axial center with the rotary shaft 3 supports ring-like reel 10 through a bearing 9. The second rotary mask 2 is fitted to the reel 10, and when a motor 5 rotates a pulley 13, the reel 10 is rotated through a belt 14 and the second mask is rotated on the same axial center with the first mask. The rotations of the first mask and the second mask are not mutually interfered. At the time of radiating the laser beam L on a work 26 through the masks 1, 2, the pattern without any shifting can be marked on the work 26. |
