GAS-LOADED PRESSURE DIAPHRAGM FOR SINTERING CERAMIC SHEETS

摘要

A gas-loaded diaphragm (10) for exerting a predetermined pressure on a ceramic substrate during sintering to prevent x-y shrinkage. In the most preferred embodiment, the diaphragm comprises a gas-filled base composed of two opposing discs, and a substantially hollow gas-filled toroid container (20) disposed around the perimeter of the opposing discs and communicating therewith to permit gas flow therebetween. This diaphragm (10) is disposed in relation to a ceramic substrate-containing cell (28) so that when it is heated to a desired temperature, the gas in the diaphragm expands and forces the two opposing discs (12) apart to thereby exert a predetermined pressure on the ceramic substrate-containing cell (28).