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发明名称
CHEMICAL VAPOR DEPOSITION REACTOR AND METHOD FOR USE THEREOF
摘要
申请公布号
EP0449821(A4)
申请公布日期
1992.01.08
申请号
EP19890905370
申请日期
1988.12.21
申请人
MONKOWSKI-RHINE, INC
发明人
MONKOWSKI, JOSEPH, R.;LOGAN, MARK, A.
分类号
C23C16/44;C23C16/455;C23C16/458;H01L21/205;H01L21/31;(IPC1-7):C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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