| 摘要 |
<p>PURPOSE:To simplify structure, and to shorten transfer hours with a small size, in a transfer device for moving semiconductor substrate housing cassettes in the perpendicular direction on the same plane, by sandwiching a guide rail between a pair of grooved wheels provided beneath a carriage, so that the carriage can be moved by a looped transmission wire. CONSTITUTION:Cassettes 2 are placed on placing tables 37 of respective carriages 21, and an electric motor 43 is started to produce a tension in a wire 4. Thereby the carriage 21 is pulled and moved by respective grooved wheels 23 (23a,23b) and a rail 20 in the direction of K (not shown). When the carriage reaches the curved part of the rail 20, although the slack is caused in the wire 40, however, it is absorbed by a tension wheel 48 to maintain a constant tension. And, since the carriage 21 is sandwichedly held by the grooved wheels 23 from both sides to the rail 20, it can stably travel the curved part along the rail 20.</p> |
