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发明名称
METHOD AND DEVICE FOR HEAT TREATMENT
摘要
申请公布号
JPH043915(A)
申请公布日期
1992.01.08
申请号
JP19900104689
申请日期
1990.04.20
申请人
HITACHI LTD
发明人
INABA KEIZO;TATEFURU NOBORU
分类号
H01L21/205;H01L21/22;(IPC1-7):H01L21/22
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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