发明名称 PROCESS FOR THE MANUFACTURE OF SHORT CIRCUITS ON THE ANODE SIDE OF THYRISTORS
摘要 Short circuits on the anode side of thyristors can be manufactured easily and inexpensively if a p-doped layer is first generated on the anode side. On it, after an oxide masking and structuring process, grooves (7) are produced, which extend into the base zone (1) of the thyristor on the anode side, in which the short-circuit areas are then generated. After the oxide has been removed, the anode electrode is applied, which contacts the p-doped layer and the short-circuit areas. As an alternative, the short-circuit areas may also be generated first through the openings of a structured oxide. Then, after removal of the oxide, the entire surface is p-doped, with the doping being less than that of the short-circuit areas. Then the anode electrode is applied.
申请公布号 US5079175(A) 申请公布日期 1992.01.07
申请号 US19900629312 申请日期 1990.12.18
申请人 EUPEC EUROPAEISCHE GESELLSCH. F. LIESTUNGSHALBLEITER MBH+CO. KG 发明人 SCHUH, GOTTFRIED;SCHULZE, HANS-JOACHIM
分类号 H01L29/74;H01L21/28;H01L21/332 主分类号 H01L29/74
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