| 摘要 |
<p>PURPOSE:To manufacture products in different forms by necessary quantities without reducing the manufacturing efficiency, by grasping in advance the data concerning the structure of the form of the body to be processed and the processing content and correcting the data after performing the treatment of the form proper corresponding to each bodies to be processed of a hybrid lot. CONSTITUTION:A control part 1 decides as to whether or not an individual sheet processing process by reading the process order of the hybrid lot required for manufacture, reading the structural data of a wafer from a lot control file 4 in case of the leaf and sheet processing by a mask mating device 6, setting to the mask mating device 6 with a parameter being read from a manufacture conditions file 5 and performing photoengraving processes in order. On the other hand, one form composing the lot is read in case of a batch processing by a dispersion equipment 7, a parameter is set on the dispersion equipment 7 with its reading from the manufacturing conditions file 5 and the dispersion process for the wafer of the cassette inside is performed in a lump. On completion of the processing of one process, the inspection of the wafer is performed and the structural data of the hybrid lot are maintained or changed according to the inspection result.</p> |
