| 摘要 |
PURPOSE:To perform qualitative analysis of a specimen coated with a deposition film by determining, through computer simulation, the concentration of each element where a measured intensity ratio and a calculated intensity ratio of each element in a specimen coated with the deposition film are equal to each other. CONSTITUTION:Concentrations of respective component elements of a specimen to be measured are assumed from X-ray intensity ratio of characteristic X-ray intensity ratio of a component element radiated from the specimen which is coated with a deposition film excited by an electron beam accelerated with an appropriate accelerating voltage against characteristic X-ray intensity ratio radiated from a single standard specimen of a component element excited by the same accelerating electron beam. The assumed element concentration of the specimen is used to perform computer simulation to obtain a calculated X-ray intensity ratio, and the concentration of the respective component elements is corrected to be equal to X-ray ratio obtained by measurement. The same computer simulation is performed with the corrected element concentration as temporary concentration. The same steps of calculation are subsequently repeated to determine composition of the specimen to be measured gradually in an approximation manner. |
