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发明名称
PLASMA ELECTRON BEAM HEATING APPARATUS
摘要
申请公布号
JPH042768(A)
申请公布日期
1992.01.07
申请号
JP19900102221
申请日期
1990.04.18
申请人
ARUBATSUKU SEIMAKU KK
发明人
TOKU AKIHIKO
分类号
C23C14/32;H01J37/305;H01L21/203;(IPC1-7):C23C14/32
主分类号
C23C14/32
代理机构
代理人
主权项
地址
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