Angle measuring method and angle measuring system

摘要

An angle measuring system including: a rotary encoder including an encoder main body and a rotating shaft which is freely rotatable with respect to the encoder main body, the rotary encoder which detects a relative rotation angle of the rotating shaft with respect to the encoder main body; a regulation member which regulates an absolute rotation angle of the encoder main body about the rotating shaft within a fixed range; an absolute angle detecting device which detects the absolute rotation angle of the encoder main body about the rotating shaft concurrently with detection of the relative rotation angle by the rotary encoder; and a correction device which corrects the rotation angle detected by the rotary encoder based on the rotation angle detected by the absolute angle detecting device.

主权项

1. A rotation angle measuring system comprising:
a rotary encoder configured to detect a relative rotation angle between a reference body and a rotationally driven rotating body which is configured rotatably with respect to the reference body, with reference to the reference body; and a laser interferometric detecting device configured to optically detect a rotation angle of the reference body from a stationary position separated from the reference body and the rotationally driven rotating body.