| 摘要 |
PURPOSE:To vary the shape of incident light in a short time without vibration and to improve the productivity of the exposure device by varying the shape and size of the beam by using two acoustooptic deflectors. CONSTITUTION:The laser beam 30 from a laser light source 1 is made incident on a lens barrel 17, shaped by a 1st fixed aperture 4 into a rectangular shape, and deflected by a 1st angle through the acoustooptic deflector 5 and a diffracted light limiting aperture 6. Further, the deflected light is deflected by a 2nd angle through the 2nd acoustooptic deflector 7 and a diffracted light limiting aperture 8, part of the projection light is cut off by the fixed aperture 9 to limit the shape, and the light irradiates a member 11 to be exposed on an XY table 12. Those deflectors 5 and 6 and diffracted light limiting apertures 6 and 8 are controlled by a CPU 24, so the response is made fast. |
