| 摘要 |
<p>A clean bench includes a working space (1) being formed with air blowing ports (18) and air suction ports (7), an air circulation flow passage (11) provided so as to communicate the air blowing ports with the air suction ports, a first blower (3) for producing a circulating air current in an air circulation system composed of the working space and the air circulation flow passage, a filter (2) mounted in the air circulation system, a second blower (15) for feeding air of the outside of the air circulation system, an air curtain blowing port (13) for supplying the air fed by the second blower to an opening (17) for working formed in the working space to provide an air curtain, and exhaust means (8, 12) located in the air circulation flow passage to release a portion of the air current to the atmosphere.</p> |
