发明名称 A METHOD OF PRODUCING A SEMICONDUCTOR LASER
摘要 <p>A method of producing a semiconductor laser is provided which comprises a first time crystal growth process for producing a crystal growth layer (1, 2 3) including at least a semiconductor layer (2) including aluminum on a substrate (1), a process for producing a stripe groove (10) by conducting a selective etching to the crystal growth layer to expose a portion of the semiconductor layer (2) including aluminum, and a second time crystal growth process for producing a semiconductor layer (4) including no aluminum on the entire wafer surface including the exposed surface of the semiconductor layer (2) and further producing a semiconductor layer (5) including aluminum on the semiconductor layer (4) including no aluminum. The production of a high resistance layer (9) having bad crystallinity at the second time crystal growth is thus prevented.</p>
申请公布号 EP0270361(B1) 申请公布日期 1992.01.02
申请号 EP19870310623 申请日期 1987.12.02
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 NAGAI, YUTAKA MITSUBISHI DENKI KABUSHIKI KAISHA;MIHASI, YUTAKA MITSUBISHI DENKI KABUSHIKI KAISHA;YAGI, TETSUYA MITSUBISHI DENKI KABUSHIKI KAISHA;OTA, YOICHIRO MITSUBISHI DENKI KABUSHIKI KAISHA
分类号 H01S5/00;H01S5/223;H01S5/323 主分类号 H01S5/00
代理机构 代理人
主权项
地址