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发明名称
PROGRESSIVE INSERTION PLACEMENT OF ELEMENTS ON AN INTEGRATED SYSTEM
摘要
申请公布号
EP0229248(B1)
申请公布日期
1992.01.02
申请号
EP19860115151
申请日期
1986.10.31
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
CARPENTER, KURT DOUGLAS;JACKSON, ROGER KENT;LALLIER, KEITH WESLEY
分类号
H01L21/822;G06F17/50;H01L21/82;H01L27/04
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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