| 摘要 |
A photoconductive substrate is provided to voltage modulate a liquid crystal layer in response to input light. The substrate is partitioned into electrically isolated pixels to eliminate lateral spread of charge carriers therein, and increase the dynamic range of the liquid crystal light valve while preserving resolution. The substrate is partitioned by forming an interconnecting network of deep trenches in a surface thereof, and filling the trenches with an insulating material such as silicon dioxide. The opposite surface of the substrate is etched away to expose the silicon dioxide in the trenches, thereby providing the substrate with partitions which extend completely therethrough between the opposite surfaces.
|
