发明名称 |
PRESSURE SENSOR INCLUDING A DIAPHRAGM HAVING A PROTECTIVE LAYER THEREON |
摘要 |
The pressure sensor consists of a substrate and a diaphragm joined together around the periphery so as to form a chamber. The surface of the diaphragm facing away from the substrate is exposed to a medium whose pressure is to be measured. To protect the diaphragm against corrosion or abrasion, the diaphragm surface exposed to the medium is covered with a layer of silicon carbide, preferably by chemical vapor deposition.
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申请公布号 |
US5076147(A) |
申请公布日期 |
1991.12.31 |
申请号 |
US19900499615 |
申请日期 |
1990.03.26 |
申请人 |
ENDRESS U. HAUSER GMBH U. CO. |
发明人 |
HEGNER, FRANK;FRANK, MANFRED |
分类号 |
G01L9/00;G01L19/06 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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