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发明名称
MIST SUPPLYING DEVICE FOR FORMING THIN FILM
摘要
申请公布号
EP0252440(B1)
申请公布日期
1991.12.27
申请号
EP19870109530
申请日期
1987.07.02
申请人
PRESIDENT OF KOGYO GIJUTUIN;TAIYO YUDEN KABUSHIKI KAISHA
发明人
YUTAKA, HAYASHI;ATUO, ITOH;HIDEYO, IIDA;KIKUJI, FUKAI
分类号
B05B17/04;C23C4/12;C23C18/12
主分类号
B05B17/04
代理机构
代理人
主权项
地址
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