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发明名称
METHOD AND DEVICE FOR DETECTING DEFECTS OF PATTERNS IN MICROELECTRONIC DEVICES
摘要
申请公布号
EP0230285(B1)
申请公布日期
1991.12.27
申请号
EP19870100518
申请日期
1987.01.16
申请人
KABUSHIKI KAISHA TOYODA JIDOSHOKKI SEISAKUSHO;HATTORI, SHUZO
发明人
YOSHIDA, AKIHIRO KK TOYODA JIDOSHOKKI SEISAKUSHO;IIDA, TAKAHIDE KK TOYODA JIDOSHOKKI SEISAKUSHO;MIYAKE, HIROSHI KK TOYODA JIDOSHOKKI SEISAKUSHO;HATTORI, SHUZO
分类号
G01N21/956
主分类号
G01N21/956
代理机构
代理人
主权项
地址
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