Laser oscillator provided with blower

摘要

A laser oscillator which can estimate the rotation speed of a blower in an idle state at cheaper cost and higher precision. The laser oscillator is comprised of a resonator part, laser medium flow path, blower, drive part, controller, manometer which measures the pressure of the laser medium at a predetermined position of the laser medium flow path, and rotation speed estimating part which uses the pressure of the laser medium which is measured by the manometer and a predetermined relationship between the pressure of the laser medium and the blower rotation speed at a certain position as the basis to estimate the rotation speed of the blower. The controller controls the drive part so as to restart operation of the blower at the rotation speed which is estimated by the rotation speed estimating part when the power supply to the blower is stopped and the blower is idling.

主权项

1. A laser oscillator comprising: a resonator part which generates laser light; a laser medium flow path for introducing a laser medium into the resonator part and discharging the laser medium from the resonator part; a blower which makes the laser medium to flow through the laser medium flow path; a drive part which drives the blower; a controller which controls the drive part; a manometer which measures a pressure of the laser medium at a predetermined position of the laser medium flow path; and a rotation speed estimating part which estimates a rotation speed of the blower, based on a predetermined relationship between the pressure of the laser medium at the predetermined position and the rotation speed of the blower, and on the pressure of the laser medium measured by the manometer, wherein the controller controls the drive part so as to restart the operation of the blower at the rotation speed estimated by the rotation speed estimating part when a power supply to the blower is stopped and the blower is idling.