MANUFACTURE OF THIN FILM SOLID ELECTROLYTE

摘要

PURPOSE:To easily manufacture thin film solid electrolyte of intended composition by depositing several kinds of raw material in the layers of predetermined thickness and then heating the entire deposited layer. CONSTITUTION:After two or more kinds of raw material constituting solid electrolyte are deposited in layers, the deposited layers are heated thereby obtaining thin film solid electrolyte. For example, a tungstic acid silver layer (raw material layer) 5 and a silver iodide layer (raw material layer) 6 are sequentially deposited on a glass substrate 1 by means of electron beam heating deposition and resistor heating deposition. With respect to an obtained deposited layer 7, a plurality of heated parts 8 are heated by electron beams to have tungsten acid silver and silver iodide reacted with each other. Thus silver ion conductive solid electrolyte of AgI-Ag2WO4 is partially formed. Thus thin film solid electrolyte of intended composition consisting of a solid electrolytic material can be easily obtained.