发明名称 MICROWAVE DEVICE
摘要 <p>A microwave device comprises a substrate and fine metal particles having diameters of 0.1 mu m or smaller and arranged in a regular pattern on the substrate. In the preferred embodiment of the present invention, the substrate is subjected to electron beam irradiation in a stripe pattern and then a metal or alloy is deposited onto the irradiated area, thereby forming a regular arrangement of fine metal particle deposits which has not been successfully achieved by any prior art technique. The thus obtained device has a greatly improved high-frequency characteristics.</p>
申请公布号 EP0180104(B1) 申请公布日期 1991.12.27
申请号 EP19850113185 申请日期 1985.10.17
申请人 RESEARCH DEVELOPMENT CORPORATION OF JAPAN;FUJI PHOTO FILM CO., LTD. 发明人 UMEMURA, SHIZUO
分类号 H01L39/22;H01L27/18;H01L29/88;H01L45/00 主分类号 H01L39/22
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