发明名称 DRIVING MECHANISM FOR LOCATIONAL STAGE
摘要 <p>PURPOSE:To provide a large driving force by fixing a belt to a driven member, setting over this belt on the output shaft of an actuator, and putting the belt in pressure contact from both sides of the output shaft. CONSTITUTION:When a motor 3 is operated to turn its output shaft 3a into rotation, a belt 12 put in pressure contact with the output shaft 3a by backup rollers 11a, 11b shifts associate with rotation of the output shaft 3a in the direction according to its rotating direction due to the friction force relative to the output shaft 3a. At this time, the backup rollers 11a, 11b rotate with this running of belt 12, and the belt 12 runs smoothly. As the ends of the belt 12 are fixed to a slider 5, it also shifts together with the belt 12, which causes a table to make displacement. Thereby a large driving force is obtained.</p>
申请公布号 JPH03297042(A) 申请公布日期 1991.12.27
申请号 JP19900099377 申请日期 1990.04.17
申请人 HITACHI CONSTR MACH CO LTD 发明人 SUGIMOTO KOICHI;HARA ATSUKO
分类号 H01J37/20;G05D3/00;H01L21/68 主分类号 H01J37/20
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