METHOD OF PRODUCING A SEMICONDUCTOR LASER

摘要

A method of producing a semiconductor laser comprises a process of producing at least a support layer (8) and a mask layer (9); a process of producing an overhung portion (11) of mask layer (9) by etching these layers and side-etching the support layer (8) at above the semiconductor substrate (1) at the neighborhood of the resonator end surface; and a process of growing a lower cladding layer (4,4a), an active layer (5,5a), and an upper cladding layer (6,6a) successively on the substrate (1) by an MOCVD method; whereby a doublehetero junction structure in which the thicknesses of the respective layers at the neighborhood of the light emission end surface are less than those at the inside and central portion of the chip is obtained.