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发明名称
ORGANOMETALLIC MOLECULAR-BEAM EPITAXIAL GROWTH APPARATUS
摘要
申请公布号
JPH03297129(A)
申请公布日期
1991.12.27
申请号
JP19900100612
申请日期
1990.04.17
申请人
NEC CORP
发明人
FURUHATA NAOKI
分类号
H01L21/205;H01L21/203
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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