| 摘要 |
<p>A laser machining device comprises a position reference laser beam source (16) in addition to a machining laser beam source (11). A galvanometer scanner (13) has two reflecting surfaces, one for directing the machining laser beam to an object (14) as a machining beam spot and the other for directing a position reference laser beam as a position reference beam spot to a position reference pattern displayed on a liquid crystal display panel (18). The machining beam spot scans the surface of the object (14) according to a machining pattern. When a common table (15) is used, transfer is preferably carried out in a ratio of one to one. It is possible to make an additional table carry the panel separately from the galvanometer and the object (Fig. 6). In either event, the machining laser beam can have a higher power than the position reference laser beam. <IMAGE></p> |
