| 摘要 |
<p>A rotary object table which has a stator (112), a rotor (114), and positioning servo and measuring system (16). The system (16) is calibrated using an angular interferometer and an intermediate table having stator (122) and rotor (124). Values of angular displacement of stator (124) are determined by the interferometer by solving 3 orthogonal simultaneous equations derived from the equation R + Ro = K sin (Υ - Υo), and are compared with corresponding angular displacement as determined by the system (16).</p> |
