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经营范围
发明名称
SCANNING ELECTRON MICROSCOPE
摘要
申请公布号
JPH03295142(A)
申请公布日期
1991.12.26
申请号
JP19900096407
申请日期
1990.04.13
申请人
HITACHI LTD
发明人
KURODA KATSUHIRO;MURATA KENJI
分类号
H01J37/244;H01J37/28
主分类号
H01J37/244
代理机构
代理人
主权项
地址
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