| 摘要 |
PURPOSE:To take the large amount of displacement at a low voltage by superposing a green sheet consisting of a material indicating electrostrictive effect on a green sheet consisting of an internal electrode and further, on a green sheet where a hole formation material is printed into a prescribed form in each designated order and after that, by pressing the green sheets thermally with warm isotropic press (WIP) and performing not only removal of both a binder and hole formation materials but also burning of the above pressed substance. CONSTITUTION:After a prescribed number of green sheets are laminated and they are filled in a press mold, a laminated compact is obtained by pressing it thermally under pressure. This laminated compact is put in a rubber bag made of silicon and its inside is hermetically sealed under vacuum by a rotary pump. The compact is put in the high pressure vessel for WIP treatment and then, a pressure medium (silicon oil) is pressurized by a heating device to manufacture a pressed compact. Subsequently, an organic binder in each green sheet and a slit formation material are removed by thermal decomposition. After burning, a laminated ceramic sintered substance in which holes are formed is obtained. The treatment of WIP prevents the irregularity of density in an internal part of the laminate. |
