发明名称 CONVEYING HAND AND LITHOGRAPHY APPARATUS
摘要 A conveying hand according to the present invention, which is used to convey an object in an adsorption state using negative pressure, comprises: a contact part which comes in contact with the object; a pad which has an inner space for exhausting air; a base which is moved in a state where the pad is loaded thereon; a first elastic member which supports the pad in the gravity direction of the object to be moved on the base and restricts the movement of the pad on the base in a direction vertical to the gravity direction; and a second elastic member which seals the space connected with the inner space of a concave part of the pad and supports the pad in the gravity direction of the object to be moved on the base.
申请公布号 KR20160103929(A) 申请公布日期 2016.09.02
申请号 KR20160018223 申请日期 2016.02.17
申请人 CANON KABUSHIKI KAISHA 发明人 MATSUHIRA YASUNAO
分类号 B65G49/06;B25J15/06;B65G47/91;G02F1/13;H01L21/027;H01L21/677 主分类号 B65G49/06
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