发明名称 BUMP STRUCTURE FOR BONDING PAD OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To eliminate an expensive facility and complicated forming steps, and to form bumps only on a semiconductor chip of satisfactory product by providing a resin film on a bonding pad, and holding conductive particles on the film. CONSTITUTION:A resin film 9 is provided on a bonding pad 2, conductive particles 10 are held on the film 9, and a wiring terminal 12 of a board is conducted to the pad 2 on a semiconductor device by the particles 10. That is, in order to hold the particles 10 on the film 9, it is performed by physical steps of forming the film 9 and then pressing the particles 10 on the film 9. After a wafer is divided into respective semiconductor chip 8, the bumps can be formed. Thus, the bumps can be formed only on the chip of satisfactory product, and an expensive manufacturing facility is not required.
申请公布号 JPH03293729(A) 申请公布日期 1991.12.25
申请号 JP19900096880 申请日期 1990.04.12
申请人 ROHM CO LTD 发明人 HIRAI MINORU
分类号 H01L21/60;H01L21/321 主分类号 H01L21/60
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