| 摘要 |
PURPOSE:To improve the quality and the yield by forming connection lines for connection among ground-side electrode fingers and plural connection lines which connect respective surface acoustic wave elements to scribe lines. CONSTITUTION:Connection lines 4 which connect outermost ground-side electrode fingers 23, 24, and 26 in surface acoustic wave elements 2 and plural connection lines 5 which connect respective surface acoustic wave elements 2 to scribe lines 3 are formed. Conductor patterns formed on a piezoelectric body wafer 1 are set to the same potential in the production stage before separation to individual elements because all of them are electrically connected. Even if the electric charge based on the pyroelectric effect due to the temperature change for heating treatment is generated, a high voltage is not generated among electrode conductor patterns by immediate neutralization to prevent discharging, and electrode destruction does not occur. Thus, the quality and the yield of a surface acoustic wave filter having the multi-electrode constitution are improved. |
