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发明名称
PROBE CARD
摘要
申请公布号
JPH03293742(A)
申请公布日期
1991.12.25
申请号
JP19900096769
申请日期
1990.04.12
申请人
HITACHI LTD
发明人
ISHIDA TAKASHI;KOBAYASHI TSUNEO;UDA TAKAYUKI
分类号
G01R31/26;G01R1/073;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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